1.156-GHz self-aligned vibrating micromechanical disk resonator

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 51, Issue 12, 2004, Pages 1607-1627

  Wang, Jing ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENIC TEMPERATURE; IMAGE-REJECT FILTERS; MICROMECHANICAL DISK RESONATORS;

COMPUTER SIMULATION; CRYOGENICS; EQUIVALENT CIRCUITS; FINITE ELEMENT METHOD; POLYSILICON; SILICON CARBIDE;

RESONATORS;

EID: 12344335333     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2004.1386679     Document Type: Article

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