Phase lock loop based temperature compensation for mems oscillators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 661-664

  Salvia, J ^a   Melamud, R ^a   Chandorkar, S ^a   Lee, H K ^a   Qu, Y Q ^a   Lord, S F ^a   Murmann, B ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONSTANT TEMPERATURE; FREQUENCY REFERENCE; LOOK UP TABLE; MEMS OSCILLATORS; MICRO RESONATORS; PHASE LOCK LOOPS; REAL TIME MEASUREMENTS; TEMPERATURE COEFFICIENT; TEMPERATURE COMPENSATION;

CALIBRATION; TABLE LOOKUP; TEMPERATURE DISTRIBUTION; TIME MEASUREMENT;

CURRENT VOLTAGE CHARACTERISTICS;

EID: 65949085600     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805469     Document Type: Conference Paper

References (18)

1. M. Lutz et al., "MEMS oscillators for high volume commercial applications," in Digest Tech Papers Transducers '07 Conference, Lyon, France, Jun. 10- 14, 2007, pp. 49-52.
2. G.K. Ho, K. Sundaresan, S. Pourkamali, F. Ayazi, "Temperature compensated IBAR reference oscillators," Proc. 19th IEEE MEMS 2006, Istanbul, Turkey, Jan. 22-26, 2006, pp. 910-913. (Pubitemid 44592442)
3. R. Melamud et al., "Temperature-compensated highstability silicon resonators," Applied Physics Letters, vol.90, 244107, Jun. 2007.
4. W.-T. Hsu, C.T.-C. Nguyen, "Geometric stress compensation for enhanced thermal stability in micromechanical resonators," Proc. IEEE Itnl. Ultrasonic Symp., Sendai, Japan, Oct. 5-8, 1998, pp. 945-948.
5. W.-T. Hsu, C.T.-C. Nguyen, "Stiffness compensated temperature insensitive micromechanical resonators," Proc. 15th IEEE MEMS 2002, Las Vegas, NV, USA, Jan. 20-24, 2002, pp. 731-734. (Pubitemid 34216374)
6. M. A. Hopcroft et al., "A high stability MEMS frequency reference," in Digest Tech Papers Transducers '07 Conference, Lyon, France, Jun. 10- 14, 2007, pp. 1307-1309.
7. J. Salvia et al., "Exploring the limits and practicality of Q-based temperature compensation for silicon resonators" to be presented at IEDM 2008, San Francisco, CA, USA, Dec. 15-17, 2008.
8. C. M. Jha et al., "High resolution microresonatorbased digital temperature sensor," Applied Physics Letters, vol.91, 074101-3, Aug. 2007. (Pubitemid 47283622)
9. C. M. Jha et al., "Thermal isolation of encapsulated MEMS resonators," J. of Microelectromech. Syst., vol.17, no. 1, pp. 175-184, Feb. 2008.
10. A. Partridge, A.E. Rice, T.W. Kenny, M. Lutz, "New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers," Proc. 14th IEEE MEMS 2001, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 54-59.
11. M. Agarwal et al., "Nonlinear characterization of electrostatic MEMS resonators," Proc. IEEE Frequency Control Symp., 2006, Miami, FL, USA, Jun. 4-7, 2006, pp. 209-1121
12. "Timekeeping accuracy, automatic and affordable," Application Note 3566, Maxim Integrated Products, Aug. 17, 2005.
13. SiT8102 Datasheet Rev 1.04, SiTime Corporation, Aug. 12, 2008.
14. C.T.-C. Nguyen, R.T. Howe, "Microresonator frequency control and stabilization using an integrated micro oven," Digest Tech Papers Transducers '93 Conference, Yokohama, Japan, Jun. 7-10, 1993, pp. 1040-1043.
15. C4600 OCXO Datasheet, Vectron International, v2006-11-10
16. K. Sundaresan, G.K. Ho, S. Pourkamali, F. Ayazi, "A two-chip, 4-MHz, microelectromechanical reference oscillator," Proc. Itnl. Symp. Circ. Sys. 2005, Kobe, Japan, May 23-26, 2005, pp. 5461-5464.
17. G. Bahl et al., "Observations of fixed and mobile charge in composite MEMS resonators," Proc. Hilton Head Workshop, Jun. 1-5, 2008, pp. 102-105.
18. M. Koskenvuori, V. Kaajakari, T. Mattila, I. Tittonen, "Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator," Proc. 21nd IEEE MEMS 2008, Tucson, AZ, USA, Jan. 13-17, 2008, pp. 78-81