Scalable 1.1 GHz fundamental mode piezo-resistive silicon MEMS resonator

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2007, Pages 411-414

  Van Beek, J T M ^a   Verheijden, G J A M ^a   Koops, G E J ^a   Phan, K L ^a   Van Der Avoort, C ^a   Van Wingerden, J ^a   Ernur Badaroglu, D ^b   Bontemps, J J M ^a,b  

^a NXP TSMC Research Center   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRON DEVICES; MEMS; NONMETALS; RESONATORS; SILICON;

CHIP AREAS; FUNDAMENTAL MODES; MEMS RESONATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 50249104439     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2007.4418960     Document Type: Conference Paper

References (10)

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