A review of thin-film resonator technology

IEEE Microwave Magazine

Volumn 4, Issue 4 SPEC. ISS., 2003, Pages 61-67

  Lakin, K M ^a  

^a TFR Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL RESONANCE; PIEZOELECTRIC RESONATOR; QUARTZ CRYSTAL TECHNOLOGY; THIN FILM RESONATOR; THIN METAL ELECTRODE; HIGHER FREQUENCIES; PIEZOELECTRIC FILM; QUARTZ CRYSTAL; RESONATOR FILTERS; RLC CIRCUIT; SURFACE ACOUSTIC WAVES; THIN FILM RESONATOR TECHNOLOGY; THIN FILM RESONATORS;

ACOUSTIC BULK WAVE DEVICES; BOUNDARY CONDITIONS; CIRCUIT RESONANCE; CRYSTAL RESONATORS; ELECTRODES; ELECTROMECHANICAL DEVICES; EQUIVALENT CIRCUITS; MICROELECTRONIC PROCESSING; PIEZOELECTRIC MATERIALS; VIBRATIONS (MECHANICAL); ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; FILMS; MICROELECTRONICS; MICROWAVE FILTERS; NATURAL FREQUENCIES; PIEZOELECTRICITY; RESONANCE; RESONATORS; TRANSISTORS;

THIN FILMS;

EID: 1542365404     PISSN: 15273342     EISSN: None     Source Type: Trade Journal    
DOI: 10.1109/MMW.2003.1266067     Document Type: Article

References (4)

1. R. Weigel, D.P. Morgan, J.M. Owens, A. Ballato, K.M. Lakin, K. Hashimoto, and C.C. Ruppel, "Microwave acoustic materials, devices, and applications," IEEE Trans. Microwave Theory Tech., vol. 50, pp. 738-749, Mar. 2002.
2. K.M. Lakin, "Thin film resonator technology," in Proc. IEEE 2003 Frequency Cont. Symp., p. 765.
3. R. Ruby, P. Bradley, J.D. Larson III, and Y. Oshmyansky, "PCS 1900 MHz duplexer using thin film bulk acoustic resonator (FBARS)," Electron. Lett., vol. 35, no. 10, May 13, 1999.
4. R. Aigner, J. Ella, H.J. Timme, L. Elbrecht, W. Nessler, and S. Marksteiner, "Advancement of MEMS into RF-filter applications," 2002 IEDM Symp. Dig., pp. 897-900.