A single-crystal-silicon bulk-acoustic-mode microresonator oscillator

IEEE Electron Device Letters

Volumn 29, Issue 7, 2008, Pages 701-703

  Lee, Joshua E Y ^a   Bahreyni, Bahreyni ^a   Zhu, Yong ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Allan deviation; Bulk acoustic resonators; High quality factor; MEMS oscillator; Single crystal silicon (SCS)

Indexed keywords

ACOUSTICS; NATURAL FREQUENCIES; NONMETALS; OPTICAL DESIGN; POWDERS; RESONATORS; TIME MEASUREMENT;

ACOUSTIC MODES; ALLAN DEVIATION; MEMS PROCESS; MICRO MECHANICAL RESONATORS; MICRO RESONATORS; QUALITY FACTOR (Q FACTOR); RESONANT FREQUENCIES; SINGLE CRYSTAL SILICON (SCS); TIMING REFERENCE (TR);

SILICON;

EID: 47249163331     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/LED.2008.2000643     Document Type: Article

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