Low-motional-impedance highly-tunable I2 resonators for temperature-compensated reference oscillators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 116-120

  Ho, Gavin K ^a   Sundaresan, Krishnakumar ^a   Pourkamali, Siavash ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRIC IMPEDANCE; ELECTRIC POTENTIAL; OPTIMIZATION; SILICON ON INSULATOR TECHNOLOGY; TUNING;

BIAS VOLTAGE; MICROMECHANICAL RESONATORS; MOTIONAL IMPEDANCE; TUNING RANGE;

RESONATORS;

EID: 26844472199     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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2. Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "60-MHz wine-glass micromechanical-disk reference oscillator," in Proc. ISSCC 2004, pp. 322-323.
3. V. Kaajakari, T. Mattila, A. Oja, J. Kiihamäki, and H. Seppä, "Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications," in IEEE Electron Device Letters, V25 N4, Apr2004, pp. 173-175.
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7. S. Pourkamali, and F. Ayazi, "Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps", in Proc. IEEE MEMS '04, The Netherlands, Jan. 2004, pp 813-816.
8. J. Dickson, "On-chip High-Voltage Generation in NMOS Integrated Circuits Using an Improved Voltage Multiplier Technique," IEEE J. Solid-State Circuits, vol. 11, no. 6, pp. 374-378, June 1976.