Limits of quality factor in bulk-mode micromechanical resonators

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 74-77

  Chandorkar, S A ^a   Agarwal, M ^a   Melamud, R ^a   Candler, R N ^a   Goodson, K E ^a   Kenny, T W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALTERNATIVE MATERIALS; ENERGY LOSS MECHANISMS; INTERNATIONAL CONFERENCES; MICRO-ELECTRO MECHANICAL SYSTEMS; MICRO-MECHANICAL RESONATORS; ORDER-OF MAGNITUDES; QUALITY FACTOR; SILICON RESONATORS;

COMPOSITE MICROMECHANICS; ENERGY DISSIPATION; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; NONMETALS; OXIDE MINERALS; Q FACTOR MEASUREMENT; QUARTZ; REACTIVE ION ETCHING; SILICON; SILICON CARBIDE;

RESONATORS;

EID: 50149100005     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443596     Document Type: Conference Paper

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