Internal dielectric transduction in bulk-mode resonators

Journal of Microelectromechanical Systems

Volumn 18, Issue 6, 2009, Pages 1401-1408

  Weinstein, Dana ^a   Bhave, Sunil A ^b  

^a USA   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

Acoustic transducers; Acoustoelectric devices; Capacitance transducers; Q factor; Resonators; Semiconductor devices

Indexed keywords

ACOUSTIC WAVELENGTH; ACOUSTOELECTRIC DEVICES; BULK-MODE; CAPACITANCE TRANSDUCERS; DESIGN OPTIMIZATION; DIELECTRIC THICKNESS; FREQUENCY-SCALING; GEOMETRIC OPTIMIZATION; HARMONIC RESONANCE; HIGH FREQUENCY HF; INTERNAL-DIELECTRIC FILMS; Q-FACTOR; Q-FACTORS; QUALITY FACTORS; RESONANT MODE; SILICON BAR; THIN DIELECTRIC FILM; TRANSDUCTION EFFICIENCY;

ACOUSTIC RESONATORS; ACOUSTICS; BACTERIOPHAGES; CAPACITANCE; DIELECTRIC DEVICES; DIELECTRIC FILMS; OPTIMIZATION; PIEZOELECTRIC TRANSDUCERS; Q FACTOR MEASUREMENT; RESONATORS; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR SWITCHES;

ACOUSTIC TRANSDUCERS;

EID: 71549115448     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2009.2032480     Document Type: Article

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