Temperature compensation of silicon micromechanical resonators via degenerate doping

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2009, Pages

  Samarao, Ashwin K ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON-DOPING; FREE CHARGE CARRIERS; HIGH QUALITY FACTORS; IN-VACUUM; MICROMECHANICAL RESONATOR; REDUCTION TECHNIQUES; SILICON BULK ACOUSTIC RESONATORS; SILICON RESONATORS; TEMPERATURE COEFFICIENT OF FREQUENCIES; TEMPERATURE COMPENSATION;

BORON; BORON COMPOUNDS; ELECTRON DEVICES; RESONATORS;

ACOUSTIC RESONATORS;

EID: 77952337062     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2009.5424221     Document Type: Conference Paper

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