Low-impedance VHF and UHF capacitive silicon bulk acoustic wave resonators - Part I: Concept and fabrication

IEEE Transactions on Electron Devices

Volumn 54, Issue 8, 2007, Pages 2017-2023

  Pourkamali, Siavash ^a   Ho, Gavin K ^b   Ayazi, Farrokh ^b  

^a University of Denver   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bulk acoustic wave resonators; High aspect ratio poly and single crystalline silicon (HARPSS); MEMS; Micromachining; Micromechanical resonators; Silicon resonators

Indexed keywords

ELECTRIC RESISTANCE; MEMS; MICROMACHINING; POLYSILICON; SEMICONDUCTING SILICON; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS;

BULK ACOUSTIC WAVE RESONATORS; HIGH-ASPECT-RATIO POLY AND SINGLE CRYSTALLINE SILICON; MICROMECHANICAL RESONATORS; SINGLE-CRYSTAL SILICON (SCS) CAPACITIVE RESONATORS;

RESONATORS;

EID: 34547864173     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.901403     Document Type: Article

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