A 145MHz low phase-noise capacitive silicon micromechanical oscillator

Technical Digest - International Electron Devices Meeting, IEDM

Volumn , Issue , 2008, Pages

  Lavasani, Hossein Miri ^a   Samarao, Ashwin K ^a   Casinovi, Giorgio ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMON SOURCES; HIGH QUALITY FACTORS (Q); LOW PHASE NOISE; MICRO-MECHANICAL RESONATORS; MOTIONAL IMPEDANCES; PHASE-NOISE; SHUNT-SHUNT FEEDBACKS; SILICON BULK ACOUSTIC RESONATORS; SILICON MICROMECHANICAL OSCILLATORS; TRANS-IMPEDANCE AMPLIFIERS;

ACOUSTIC IMPEDANCE; DIFFERENTIAL AMPLIFIERS; ELECTRON DEVICES; RESONATORS;

OSCILLATORS (ELECTRONIC);

EID: 64549116238     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IEDM.2008.4796784     Document Type: Conference Paper

References (7)

1. L. Yu-Wei, et al, "Series-resonant VHF micromechanical resonator reference oscillators," JSSC, vol.39, no.12, pp. 2477-2491, Dec. 2004.
2. K. Sundaresan, et al, "A low phase noise 100MHz silicon BAW reference oscillator," Proc. IEEECICC, pp.841-844, Sept. 2006.
3. S. Pourkamali, et al, "Low-Impedance VHF and UHF capacitive SiBARs - Part II: measurement & characterization", IEEE Transaction on Electron Devices, vol.54, pp. 2024-2030, Aug. 2007.
4. S. Pourkamali, et al, "Low-Impedance VHF and UHF capacitive SiBARs -Part I: concept & fabrication", IEEE Transaction on Electron Devices, vol.54, no.8, pp. 2017-2023, Aug. 2007.
5. D. Weinstein, S. A. Bhave, "Internal dielectric transduction of a 4.5GHz silicon bar resonator", Proc. IEDM 2007, pp. 415-4418.
6. S. Pourkamali, and F. Ayazi, "Wafer-level encapsulation and sealing of electrostatic HARPSS transducers," IEEE Sensors 2007, pp. 49-52.
7. J. S. Wang, et al, "Low temperature coefficient shear wave thin films for composite resonators and filters", Proc. 1983 Ultrasonics Symposium, pp. 491-494, 1983.