MEMS-based quartz oscillators and filters for on-chip integration

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn 2005, Issue , 2005, Pages 122-127

  Kubena, R L ^a   Stratton, F P ^a   Chang, D T ^a   Joyce, R J ^a   Hsu, T Y ^a   Lim, M K ^b   M'Closkey, R T ^b  

^a Hughes Aircraft Co   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHIP SCALE PACKAGES; CRYSTAL OSCILLATORS; MICROELECTROMECHANICAL DEVICES; QUARTZ; SENSITIVITY ANALYSIS; WAVE FILTERS;

POWER HANDLING; PROTOTYPE OSCILLATORS; QUARTZ RESONATORS; TEMPERATURE SENSITIVITY;

CRYSTAL RESONATORS;

EID: 33846587576     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2005.1573913     Document Type: Conference Paper

References (7)

1. Statek Corporation, Technical Note 28, Rev. A, "An ultra-miniature low-profile AT quartz resonator."
2. C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized low-power communication devices," IEEE Transactions on Microwave Theory and Techniques, Vol. 47, No. 8, pp. 1486-1503, 1999.
3. D. Chang, F. Stratton, R. Kubena, R. Joyce, "Optimized DRIE etching of ultra-small quartz resonators," Proceedings of the 2003 IEEE International Frequency Control Symposium, pp. 829-832, 2003.
4. F. P. Stratton, D. T. Chang, D. J. Kirby, R. J. Joyce, T-Y Hsu, R. L. Kubena, Y-K Yong, "A MEMS-based quartz resonator technology for GHz applications," Proceedings of the 2004 IEEE International Frequency Control Symposium, pp. 27-34, 2004.
5. R. Smythe and R. Angove, "Chemically-milled UHF SC-cut resonators," Proceedings of the 1988 IEEE International Frequency Control Symposium, pp. 73-77, 1988.
6. R. A. Sykes and W. D. Beaver, "High frequency monolithic crystal filters with application to single frequency and single sideband use," Proceedings of the 20 Ann. Freq. Control Symposium, pp. 288-308, 1966.
7. th Ann. Freq. Control Symposium, pp. 266-287, 1966.