Square-extensional mode single-crystal silicon micromechanical RF-resonator

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 951-954

  Kaajakari, V ^a,b   Mattila, T ^a   Oja, A ^a   Kiihamaki J ^a   Kattelus, H ^a   Koskenvuori, M ^b   Rantakari, P ^b   Tittonen, I ^b   Seppa H ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

Acoustic measurements; Current measurement; Equivalent circuits; Etching; Micromechanical devices; Oscillators; Prototypes; Q factor; Shape; Silicon on insulator technology

Indexed keywords

ACTUATORS; ELECTRIC CURRENT MEASUREMENT; EQUIVALENT CIRCUITS; ETCHING; MICROMECHANICAL RESONATORS; MICROSYSTEMS; MONOCRYSTALLINE SILICON; OSCILLATORS (ELECTRONIC); Q FACTOR MEASUREMENT; REACTIVE ION ETCHING; RESONATORS; SILICON; SILICON WAFERS; SINGLE CRYSTALS; SOLID-STATE SENSORS; TRANSDUCERS; VIBRATIONS (MECHANICAL);

ACOUSTIC MEASUREMENTS; MICROMECHANICAL DEVICE; PROTOTYPES; Q-FACTORS; SHAPE;

SILICON ON INSULATOR TECHNOLOGY;

EID: 52649124720     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216924     Document Type: Conference Paper

References (7)

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