A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 349-352

  Hsu, W T ^a   Clark, J R ^a   Nguyen, C T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPLATING; ETCHING; LITHOGRAPHY; MICROELECTRODES; RESONATORS; SEMICONDUCTOR DEVICE MANUFACTURE;

MICROMECHANICAL RESONANTORS;

COMPOSITE MICROMECHANICS;

EID: 0035008072     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)