Nonlinear limits for single-crystal silicon microresonators

Journal of Microelectromechanical Systems

Volumn 13, Issue 5, 2004, Pages 715-724

  Kaajakari, Ville ^a   Mattila, Tomi ^a   Oja, Aarne ^a   Seppä, Heikki ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; BIFURCATION (MATHEMATICS); EQUATIONS OF MOTION; HYSTERESIS; OSCILLATIONS; OSCILLATORS (ELECTRONIC); RESONATORS; SEMICONDUCTING SILICON; SPURIOUS SIGNAL NOISE; VIBRATIONS (MECHANICAL);

MICRORESONATORS; NONLINEAR OSCILLATORS; OSCILLATOR NOISE; PHASE NOISE;

MICROELECTROMECHANICAL DEVICES;

EID: 7244239515     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.835771     Document Type: Article

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