Novel temperature compensation scheme for microresonators based on controlled stiffness modulation

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 2457-2460

  Seo, Jae Hyeong ^a   Demirci, Kemal Safak ^a   Byun, Albert ^a   Truax, Stuart ^a   Brand, Oliver ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Frequency drift; Resonator; Stiffness modulation; Temperature compensation

Indexed keywords

ACTUATORS; MICROSTRUCTURE; MICROSYSTEMS; MODULATION; RESONATORS; SENSORS; TRANSDUCERS;

AMBIENT TEMPERATURES; AND DETECTION; COMPENSATION METHODS; FEED BACK LOOPS; FREQUENCY CHANGES; FREQUENCY DRIFT; FREQUENCY DRIFTS; FREQUENCY FLUCTUATIONS; INDUCED STRESSES; INTERNATIONAL CONFERENCES; MICRO-RESONATORS; MICROMACHINED; NOVEL STRATEGIES; RESONATOR; SOLID-STATE SENSORS; SPRING CONSTANTS; STIFFNESS MODULATION; TEMPERATURE COMPENSATION; TEMPERATURE COMPENSATIONS;

STIFFNESS;

EID: 50049128641     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300668     Document Type: Conference Paper

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