Piezoresistive heat engine and refrigerator

Nature Physics

Volumn 7, Issue 4, 2011, Pages 354-359

  Steeneken, P G ^a   Le Phan, K ^a   Goossens, M J ^a   Koops, G E J ^a   Brom, G J A M ^a   Van Der Avoort, C ^a   Van Beek, J T M ^a  

^a NXP SEMICONDUCTORS   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

BROWNIAN MOVEMENT; MECHANICAL DRIVES; REFRIGERATORS; RESONATORS; THERMODYNAMIC PROPERTIES;

CRYSTALLINE SILICONS; EXPANSION AND CONTRACTION; OSCILLATION THRESHOLD; PIEZORESISTIVE EFFECTS; SILICON RESONATORS; SUSTAINED OSCILLATIONS; THERMAL FLUCTUATIONS; THERMODYNAMIC CYCLE;

HEAT ENGINES;

EID: 79953709687     PISSN: 17452473     EISSN: 17452481     Source Type: Journal    
DOI: 10.1038/nphys1871     Document Type: Article

References (28)

1. Epstein, A. H. Millimeter-scale, micro-electro-mechanical systems gas turbine engines. J. Eng. Gas Turbines Power 126, 205-226 (2004). (Pubitemid 40231349)
2. Jacobson, S. A. & Epstein, A. H. Int. Symp. Micro-Mech. Eng. (ISMME) pK18 (2003).
3. Spadaccini, C. M. & Waitz, I. A. Comprehensive Microsystems Ch. 3.15 (Elsevier, 2008).
4. Peterson, R. B. Size limits for regenerative heat engines. Nanoscale Microscale Thermophys. Eng. 2, 121-131 (1998). (Pubitemid 128087923)
5. Wilfinger, R. J., Bardell, P. H. & Chhabra, D. S. The resonistor: A frequency selective device utilizing the mechanical resonance of a silicon substrate. IBM J. Res. Dev. 12, 113-117 (1968).
6. Elwenspoek, M. et al. Transduction mechanisms and their applications in micromechanical devices. Proc. IEEE MEMS 126-132 (1989).
7. Lammerink, T., Elwenspoek, M. & Fluitman, J. Frequency dependence of thermal excitation of micromechanical resonators. Sens. Actuat. A 25-27, 685-689 (1991). (Pubitemid 21696225)
8. Guckel, H. et al. Thermo-magnetic metal flexure actuators. IEEE Solid-State Sens. Actuat. Workshop 5, 73-75 (1992).
9. Reichenbach, R. B., Zalalutdinov, M., Parpia, J. M. & Craighead, H. G. RF MEMS oscillator with integrated resistive transduction. IEEE Elect. Dev. L. 27, 805-807 (2006).
10. Seo, J. H. & Brand, O. High Q-factor in-plane-mode resonant microsensor platform for gaseous/liquid environment. J. MEMS 17, 483-493 (2008).
11. Cohadon, P., Heidmann, A. & Pinard, M. Cooling of a mirror by radiation pressure. Phys. Rev. Lett. 83, 3174-3177 (1999). (Pubitemid 129582857)
12. Metzger, C. H. & Karrai, K. Cavity cooling of a microlever. Nature 432, 1002-1005 (2004). (Pubitemid 40052225)
13. Arcizet, O., Cohadon, P-F., Briant, T., Pinard, M. & Heidmann, A. Radiation-pressure cooling and optomechanical instability of a micromirror. Nature 444, 71-74 (2006). (Pubitemid 44684756)
14. Kleckner, D. & Bouwmeester, D. Sub-kelvin optical cooling of a micromechanical resonator. Nature 444, 75-78 (2006). (Pubitemid 44684757)
15. Schliesser, A., Del'Haye, P., Nooshi, N., Vahala, K. J. & Kippenberg, T. J. Radiation pressure cooling of a micromechanical oscillator using dynamical backaction. Phys. Rev. Lett. 97, 243905 (2006).
16. Brown, K. R. et al. Passive cooling of a micromechanical oscillator with a resonant electric circuit. Phys. Rev. Lett. 99, 137205 (2007).
17. Metzger, C., Favero, I., Ortlieb, A. & Karrai, K. Optical self cooling of a deformable Fabry-Perot cavity in the classical limit. Phys. Rev. B 78, 035309 (2008).
18. Teufel, J., Donner, T., Castellanos-Beltran, M. A., Harlow, J. & Lehnert, W. Nanomechanical motion measured with an imprecision below that at the standard quantum limit. Nature Nanotech. 4, 820-823 (2009).
19. Feynman, R. P., Leighton, R. B. & Sands, M. The Feynman Lectures on Physics Vol. I, Ch. 46 (Addison-Wesley, 1963).
20. Spadaccini, C. et al. Proc. ASME/IGTI Turbo Expo GT-2002-30082 (2002).
21. Köser, H. & Lang, J. Modelling a high power density MEMS magnetic induction machine. Proc. MSM Nanotech. (2001).
22. Fennimore, A. M. et al. Rotational actuators based on carbon nanotubes. Nature 424, 408-410 (2003). (Pubitemid 36917484)
23. Fan, D. L., Zhu, F. Q., Cammarata, R. C.&Chien, C. L. Controllable high-speed rotation of nanowires. Phys. Rev. Lett. 94, 247208 (2005).
24. Ayari, A. et al. Self-oscillations in field emission nanowire mechanical resonators: A nanometric dc-ac conversion. Nano Lett. 7, 2252-2257 (2007). (Pubitemid 47310115)
25. Weldon, J. A., Alemán, B., Sussman, A., Gannett, W. & Zettl, A. K. Sustained mechanical self-oscillations in carbon nanotubes. Nano Lett. 10, 1728-1733 (2010).
26. Ebefors, T. & Stemme, G. The MEMS Handbook: MEMS Applications (CRC Press, 2006) (Ch. Microrobotics).
27. Burg, T. P. et al. Weighing of biomolecules, single cells and single nanoparticles in fluid. Nature 446, 1066-1069 (2007). (Pubitemid 46676057)
28. Bullis, W. M., Brewer, F. H., Kolstad, C. D. & Swartzendruber, L. J. Temperature coefficient of resistivity of silicon and germanium near room temperature. Solid-State Electron. 11, 639-646 (1968).