Fabrication of single crystal silicon resonators with narrow gaps

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1354-1357

  Kiihamaki J ^a   Kaajakari, V ^a   Luoto, H ^a   Kattelus, H ^a   Yli Koski, M ^b  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b AALTO UNIVERSITY   (Finland)

Author keywords

CMP; DRIE; Epipoly; SOI

Indexed keywords

CMP; DRIE; EPIPOLY; SOI;

CHEMICAL VAPOR DEPOSITION; ELECTROSTATICS; OXIDES; REACTIVE ION ETCHING; SILICON; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; SINGLE CRYSTALS;

RESONATORS;

EID: 27544505356     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. V. Kaajakari et. al., "Square-extensional mode single-crystal silicon micromechanical resonator for low-phase-noise oscillator applications", IEEE Electron Dev. Lett., 2004 pp. 173-175.
2. E. Quevy et.al., "Ultimate technology for micromachining of nanometric gap HF micromechanical resonators", IEEE MEMS 2003, pp.157-160.
3. W-T Hsu, J. R. Clark, C. T.-C. Nguyen, "A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators" IEEE MEMS 2001 pp. 349-352.
4. S. Pourkamali, F. Ayazi, "SOI-based HF and VHF single-crystal silicon resonators with SUB-100 nanometer vertical capacitive gaps" Proc. Transducers03 vol.1, pp. 837-840.
5. S. Pourkamali, F. Ayazi, "Fully single crystal silicon resonators with deep-submicron dry-etched transducer gaps", IEEE MEMS 2004 pp. 813-816.
6. P. Rantakari et. al., "Low Noise, Low Power Micromechanical Oscillator", abstract EA507 submitted to Transducers'05.
7. V. Kaajakari et. al., "Stability of Wafer Level Vacuum Encapsulated Single-Crystal Silicon Resonators", abstract EA488 submitted to Transducers'05.
8. A. Alastalo, T. Manila, H. Seppä, "Micro-mechanical slow-velocity delay lines", European Microwave Week 2003, München, Germany, 6-10 October 2003.