MEMS resonators that are robust to process-induced feature width variations

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2001, Pages 556-563

  Liu, R ^a   Paden, B ^a   Turner, K ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; GYROSCOPES; NATURAL FREQUENCIES;

FREQUENCY STABILITY ANALYSIS;

OPTICAL RESONATORS;

EID: 0035169789     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

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