Square wine glass mode resonator with quality factor of 4 million

Proceedings of IEEE Sensors

Volumn , Issue , 2008, Pages 1257-1260

  Lee, Joshua E Y ^a   Seshia, Ashwin A ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITOR ELECTRODE; EXPERIMENTAL CHARACTERIZATION; MECHANICAL RESONANCE FREQUENCY; MICRO RESONATORS; MICROMECHANICAL DEVICE; MODE RESONATORS; MOTIONAL RESISTANCE; ORTHOGONAL AXIS; QUALITY FACTORS; RESONANT STRUCTURES; SILICON-ON-INSULATOR PROCESS; SINGLE CRYSTAL SILICON; SQUARE PLATES; ULTRA-HIGH;

GLASS; PLATES (STRUCTURAL COMPONENTS); Q FACTOR MEASUREMENT; RESONANCE; SENSORS; SILICON WAFERS; SINGLE CRYSTALS; WINE;

RESONATORS;

EID: 67650002396     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2008.4716672     Document Type: Conference Paper

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