Post-packaging frequency tuning of microresonators by pulsed laser deposition

Journal of Micromechanics and Microengineering

Volumn 14, Issue 12, 2004, Pages 1742-1747

  Chiao, Mu ^a   Lin, Liwei ^b  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTROSTATICS; FABRICATION; METALLIC FILMS; MICROELECTROMECHANICAL DEVICES; PULSED LASER DEPOSITION; SURFACE ROUGHNESS;

MEMS; MICROFABRICATION; MICRORESONATORS; POST-PACKAGING TUNING PROCESSES;

RESONATORS;

EID: 10844249518     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/12/020     Document Type: Article

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