High Q-factor in-plane-mode resonant microsensor platform for gaseous/ liquid environment

Journal of Microelectromechanical Systems

Volumn 17, Issue 2, 2008, Pages 483-493

  Seo, Jae Hyeong ^a   Brand, Oliver ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Mass sensitive sensor; Quality factor; Resonant sensor; Resonator; Viscous damping

Indexed keywords

ANALYTICAL MODELS; CHEMICAL AND BIOLOGICAL SENSING; DISK RESONATORS; ELECTROTHERMAL EXCITATIONS; HARMONIC OSCILLATORS; HIGH Q FACTORS; HIGH-QUALITY FACTORS; IN PLANES; LIQUID ENVIRONMENTS; MASS-SENSITIVE SENSOR; MECHANICAL BEHAVIORS; MICRO-RESONATORS; PARYLENE COATINGS; PIEZO-RESISTIVE; Q FACTORS; QUALITY FACTOR; RESONANCE FREQUENCIES; RESONANT MICROSENSORS; RESONANT SENSOR; ROTATIONAL VIBRATIONS; SHAPE MICROSTRUCTURES; SHORT-TERM FREQUENCY STABILITIES; VISCOUS DAMPING; WHEATSTONE BRIDGES;

BANDPASS FILTERS; BRIDGE CIRCUITS; DAMPING; DISKS (STRUCTURAL COMPONENTS); LIQUIDS; MICROSENSORS; NANOSENSORS; NATURAL FREQUENCIES; OSCILLATORS (ELECTRONIC); RESONATORS; ROTATING DISKS;

Q FACTOR MEASUREMENT;

EID: 47749083999     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2008.916328     Document Type: Article

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