Micromachined thin-film sensors for SOI-CMOS Co-integration

Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Volumn , Issue , 2006, Pages 1-292

  Laconte, J ^a   Flandre, D ^b   Raskin, J P ^b  

^a Intersema Sensoric SA   (Switzerland)

^b UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84876472433     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/0-387-28843-0     Document Type: Book

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