Thermally Activated Ageing of Polysilicon

Proceedings of IEEE Sensors

Volumn 1, Issue 1, 2002, Pages 602-606

  Ehmann, M ^a   Schubert, F ^a   Ruther, P ^a   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

Ageing; Micro hotplate; Polysilicon

Indexed keywords

CHEMICAL SENSORS; COOLING; DIELECTRIC MATERIALS; ELECTROMIGRATION; HEAT RESISTANCE; HEATING; HIGH TEMPERATURE EFFECTS; MICROSTRUCTURE; RESISTORS; SILICON NITRIDE; THERMAL CYCLING; THERMISTORS;

AGEING; MICRO HOTPLATES;

POLYSILICON;

EID: 1542361439     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. Briand, D., Kraus, A., van der Schoot, B., Weimar, U., Barsan, N., Göpel, W., de Rooij, N.F., "Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors", Sensors and Actuators B, Vol. 68, (2000), pp. 223-233
2. 2-based micro-hotplate sensors", Sensors and Actuators B, Vol. 77, (2001), pp. 597-613
3. Grudin, O., Marinescu, R., Landsberger, L., Cheeke, D., Kahrizi, M., "Microstructure Release and Test Techniques for High-Temperature Micro Hotplate", Proc. of the 1999 IEEE Canadian Conference on Electrical and Computer Engineering, Edmonton, Canada, pp. 1610-1615
4. Parameswaran, M., Robinson, A.M., Blackburn, D.L., Gaitan, M., Geist, J., "Micromachined Thermal Radiation Emitter from a Commercial CMOS Process", IEEE Electron Device Letters, Vol. 12, No. 2, (1991), pp. 57-59
5. Mastrangelo, C.H., Hsi-Jen Yeh, J., Muller, R.S., "Electrical and Optical Characteristics of Vacuum-Sealed Polysilicon Micro-lamps", IEEE Trans. Electron Dev., Vol. 39, No. 6 (1992), pp. 1363-1375
6. Swart, N.R., Nathan, A., "Reliability Study of Polysilicon for Microhotplates", Proc. Solid-State Sensor and Actuator Workshop, Hilton Head, USA, 1994, pp. 119-122
7. Das, N.C., Monroy, C., Robinson, D., Jhabvala M., "Design and fabrication of low power polysilicon sources", Solid-State Elec., Vol. 43, (1999), pp. 1239-1244
8. Ehmann, M., Ruther, P., von Arx, M., Baltes, H., Paul, O., "Ageing behavior of polysilicon heaters for CMOS microstructures operated at temperatures up to 1200 K", Proc. MEMS 2001, (2001), pp. 147-150
9. Kamins, T.I., "Structure and properties of LPCVD silicon films", Solid-State Science and Technology, Vol. 127, No. 3, (1980), pp. 686-690