Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors

Sensors and Actuators, B: Chemical

Volumn 68, Issue 1, 2000, Pages 223-233

  Briand, D ^a   Krauss, A ^b   Van Der Schoot, B ^a   Weimar, U ^b   Barsan, N ^b   Gopel W ^b   De Rooij, N F ^a  

^a Institute for Microtechnology   (Switzerland)

^b UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON MONOXIDE; COATING TECHNIQUES; DESIGN; FABRICATION; HIGH TEMPERATURE EFFECTS; METHANE; THIN FILMS;

DROP COATING; LOW POWER CONSUMPTION; MICRO HOTPLATE;

CHEMICAL SENSORS;

EID: 0034249624     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00433-0     Document Type: Article

References (19)

1. Demarne V., Grisel A. An integrated low-power thin-film CO gas sensor on silicon. Sensors and Actuators. 13:1988;301-313.
2. Dibbern U. A substrate for thin-film gas sensors in microelectronic technology. Sensors and Actuators, B. 33:1990;63-70.
3. Wessel S., Parameswaran M., Morrison S.R., Frindt R.F. A CMOS thermally isolated heater structure as a substrate for semiconductor gas sensor. Microelectronics Journal. 23:1992;451-456.
4. Suehle J.S., Cavicchi R.E., Gaitan M., Semancik S. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing. IEEE Electron Device Letters. 14(3):1993;118-120.
5. Cavicchi R.E., Suehle J.S., Kreider K.G., Gaitan M., Chaparala P. Optimized temperature-pulse sequences for the enhancement of chemically specific response patterns from micro-hotplates gas sensors. Sensors and Actuators, B. 33:1996;142-146.
6. Gardner J.W., Pike A., de Rooij N.F., Koudelka-Hep M., Clerc P.-A., Hierlemann A., Göpel W. Integrated array sensor for detecting organic solvents. Sensors and Actuators, B. 26-27:1995;135-139.
7. 2 based thick film sensors. Sensors and Actuators, B. 43:1997;45-51.
8. 2 gas sensors: simultaneous monitoring of resistances and temperatures. Conf. Proc. of Eurosensors XII, Southampton (UK), September 13-16. 1998;633-636.
9. Briand D., Grétillat M.-A., van der Schoot B., de Rooij N.F. Thermal management of micro-hotplates using MEMCAD as simulation tool. Conf. Proc. of the 3rd Int. Conf. on the Modeling and the Simulation of Microsystems, San Diego (USA), March 27-29:2000;640-643.
10. Gall M. The Si planar pellistor: a low-power pellistor sensor in Si thin-film technology. Sensors and Actuators, B. 4:1991;533-538.
11. Götz A., Gràcia I., Cané C., Lora-Tamayo E. Thermal and mechanical aspects for designing micromachined low-power gas sensors. Journal of Micromechanics and Microengineering. 7:1997;247-249.
12. Guidi V., Cardinali G.C., Dori L., Faglia G., Ferroni M., Martinelli G., Nelli P., Sberveglieri G. Thin-film gas sensor implemented on a low-power consumption micromachined silicon structure. Sensors and Actuators, B. 49:1998;88-92.
13. Götz A., Gràcia I., Cané C., Lora-Tamayo E., Horrillo M.C., Getino J., Garcia C., Gutiérrez J. A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons. Sensors and Actuators, B. 44:1997;483-487.
14. Briand D., van der Schoot B., Jeanneret S., Clerc P.-A., de Rooij N.F., Sundgren H., Grahn I., Lundström I. Novel low-power consumption MOSFET array gas sensor. 10th Int. Conf. Solid-State Sensors and Actuators (Transducers '99), Sendai, Japan, June 7-10 Technical Digest. 1999;938-941.
15. Li X., Bao M., Shen S. Maskless etching of three-dimensional silicon structures in KOH. Sensors and Actuators, A. 57:1996;47-52.
16. 2 for gas sensor applications. Sensors and Actuators, B. 31:1996;1-8.
17. 2 based gas sensors. Fresenius' Journal of Analytical Chemistry. 361:1998;110-114.
18. Mastrangelo C.H., Chong Y.-C., Muller R.S. Thermophysical properties of low-residual stress silicon rich LPCVD silicon nitride films. Sensors and Actuators, A. 21-23:1990;856-860.
19. 4. Conf. Proc. of Eurosensors XI, Warsaw, Poland, September 21-24. 1997;1177-1180.