Screen-printed nano-grain WO3 films for micro-hotplate gas sensors

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 358-363

  Ivanov, Peter Tsolov ^a   Llobet, Eduard ^a   Vilanova, Xavier ^a   Stankova, Mariana ^a   Bresmez, Jesus ^a   Correig, Xavier ^a   Hubalek, Jaromir ^b   Malysz, Karel ^b   Gràcia, Isabel ^c   Cané, Carles ^c  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

Micromachined gas sensor; Nanopowder; Screen printing; Tungsten trioxide

Indexed keywords

CARBON MONOXIDE; CHEMICAL SENSORS; CHEMICAL VAPOR DEPOSITION; ETHANOL; MICROMACHINING; NANOSTRUCTURED MATERIALS; NITROGEN OXIDES; POROSITY; POWDERS; SCREEN PRINTING; SILICON NITRIDE; SPUTTER DEPOSITION; TUNGSTEN COMPOUNDS;

MICRO-HOTPLATE GASES; MICROMACHINED GAS SENSORS; NANOPOWDERS; TUNGSTEN TRIOXIDE;

METALLIC FILMS;

EID: 12144286220     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

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