Results on the reliability of silicon micromachined structures for semiconductor gas sensors

Sensors and Actuators, B: Chemical

Volumn 77, Issue 1-2, 2001, Pages 409-415

  Gracia I ^a   Santander, J ^a   Cane C ^a   Horrillo, M C ^b   Sayago, I ^b   Gutierrez, J ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b Consejo Superior de Investigaciones Científicas   (Spain)

Author keywords

Microelectronic gas sensor; Micromachined structures; Reliability; Survivability

Indexed keywords

MICROELECTRONIC PROCESSING; MICROMACHINING; RELIABILITY; SEMICONDUCTOR DEVICE STRUCTURES; SILICON SENSORS;

SILICON MICROMACHINED STRUCTURES;

CHEMICAL SENSORS;

EID: 0035876330     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(01)00706-7     Document Type: Article

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