Design of a low power SnO2 gas sensor integrated on silicon oxynitride membrane

Sensors and Actuators, B: Chemical

Volumn 67, Issue 1, 2000, Pages 84-88

  Astie S ^a   Gue A M ^b   Scheid, E ^b   Guillemet, J P ^a  

^a MOTOROLA INC   (United States)

^b LAAS CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; FINITE ELEMENT METHOD; SILICON COMPOUNDS; STRENGTH OF MATERIALS; TEMPERATURE; THERMAL CONDUCTIVITY;

ELECTROTHERMAL SIMULATION; POLYSILICON RESISTOR; SILICON OXYNITRIDE MEMBRANE;

CHEMICAL SENSORS;

EID: 0034251438     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00403-2     Document Type: Article

References (10)

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