Bulk micromachining of silicon

Proceedings of the IEEE

Volumn 86, Issue 8, 1998, Pages 1536-1551

  Kovacs, Gregory T A ^a,b   Maluf, Nadim I ^b   Petersen, Kurt E ^c,d  

^a Stanford University ^*  (United States)

^b Lucas NovaSensor   (United States)

^c CEPHEID   (United States)

^d STANFORD UNIVERSITY   (United States)

Author keywords

Bulk; Etching; Micromachining; Silicon

Indexed keywords

CMOS INTEGRATED CIRCUITS; COSTS; ETCHING; PLASMA ETCHING; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE;

PROCESS COMPATIBILITY; VAPOR ETCHING; WET ETCHING;

MICROMACHINING;

EID: 0032139387     PISSN: 00189219     EISSN: None     Source Type: Journal    
DOI: 10.1109/5.704259     Document Type: Article

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