SOI CMOS Gas Sensors

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1379-1384

  Udrea, F ^a   Gardner, J W ^b  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF WARWICK   (United Kingdom)

Author keywords

CMOS sensors; Micro hot plate; MOSFET heater; Smart sensors; SOI technology; Solid state gas sensors

Indexed keywords

CAPACITANCE; CATALYSIS; CMOS INTEGRATED CIRCUITS; COSTS; ELECTRIC CONDUCTIVITY; MEDICAL APPLICATIONS; MICROMACHINING; RELIABILITY; SILICON ON INSULATOR TECHNOLOGY;

MICRO-HOT PLATES; SILICON-STATE GAS SENSORS; SMART SENSORS;

CHEMICAL SENSORS;

EID: 1542361211     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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