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Volumn 33, Issue 1-3, 1996, Pages 147-150

Low-power micro gas sensor

Author keywords

Finite element method; Gas sensors; Microheaters

Indexed keywords


EID: 0042639100     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-4005(96)01822-9     Document Type: Article
Times cited : (55)

References (6)
  • 1
    • 0022699965 scopus 로고
    • Integrated hydrogen leak detector with a tunnel MIS structure
    • K. Murakami, D.-B. Ye and T. Yamamoto, Integrated hydrogen leak detector with a tunnel MIS structure, Sensors and Actuators, 13 (1988) 315-321.
    • (1988) Sensors and Actuators , vol.13 , pp. 315-321
    • Murakami, K.1    Ye, D.-B.2    Yamamoto, T.3
  • 2
    • 0025401835 scopus 로고
    • A substrate for thin-film gas sensors in microelectronic technology
    • U. Dibbern, A substrate for thin-film gas sensors in microelectronic technology, Sensors and Actuators B, 2 (1990) 63-70.
    • (1990) Sensors and Actuators B , vol.2 , pp. 63-70
    • Dibbern, U.1
  • 4
    • 0027559323 scopus 로고
    • Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
    • J.S. Suehle, R.E. Cavicchi, M. Gaitan and S. Semancik, Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing, IEEE Electron Device Lett., 14 (1993) 118-120.
    • (1993) IEEE Electron Device Lett. , vol.14 , pp. 118-120
    • Suehle, J.S.1    Cavicchi, R.E.2    Gaitan, M.3    Semancik, S.4
  • 5
    • 0027644828 scopus 로고
    • 2 low power temperature deposition technique for integrated gas sensors
    • 2 low power temperature deposition technique for integrated gas sensors, Sensors and Actuators B, 15-16 (1993) 63-67.
    • (1993) Sensors and Actuators B , vol.15-16 , pp. 63-67
    • Demarne, V.1    Grisel, A.2
  • 6
    • 0028378301 scopus 로고
    • Preparation of polycrystalline SiC films for sensors used at high temperature
    • T. Homma, K. Kamimura, H. Yi Cai and Y. Onuma, Preparation of polycrystalline SiC films for sensors used at high temperature, Sensors and Actuators A, 40 (1994) 93-96.
    • (1994) Sensors and Actuators A , vol.40 , pp. 93-96
    • Homma, T.1    Kamimura, K.2    Yi Cai, H.3    Onuma, Y.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.