High temperature silicon-on-insulator pressure sensor technology

HITEN 1999 - 3rd European Conference on High Temperature Electronics

Volumn , Issue , 1999, Pages 45-48

  Johnson, Russell L ^a  

^a Honey well Laboratories   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLOCKS; DIGITAL DEVICES; HIGH TEMPERATURE APPLICATIONS; RESISTORS; SILICON; TEMPERATURE SENSORS;

ADVANCED SENSOR TECHNOLOGIES; DOPANT CONCENTRATIONS; HIGH TEMPERATURE SENSORS; HIGH-TEMPERATURE ELECTRONICS; PIEZO-RESISTIVE SENSORS; PRESSURE SENSOR TECHNOLOGY; SILICON-ON- INSULATORS (SOI); TEMPERATURE SENSING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0009472503     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/HITEN.1999.827460     Document Type: Conference Paper

References (0)