High temperature degradation of Pt/Ti electrodes in micro-hotplate gas sensors

Journal of Micromechanics and Microengineering

Volumn 13, Issue 4, 2003, Pages

  Puigcorbe J ^a   Vogel, D ^b   Michel, B ^b   Vila A ^a   Gracia, I ^c   Cane C ^c   Morante, J R ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

^b FRAUNHOFER IZM   (Germany)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL SENSORS; DEGRADATION; ELECTRODES; FINITE ELEMENT METHOD; HIGH TEMPERATURE EFFECTS; TITANIUM;

MICRO-HOTPLATES;

PLATINUM;

EID: 0038441771     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/4/320     Document Type: Conference Paper

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