Micromechanical and tribological characterization of doped single-crystal silicon and polysilicon films for microelectromechanical systems devices

Journal of Materials Research

Volumn 12, Issue 1, 1997, Pages 54-63

  Bhushan, Bharat ^a   Li, Xiaodong ^a  

^a The Ohio State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELASTIC MODULI; FRICTION; HARDNESS; MECHANICAL PROPERTIES; NANOTECHNOLOGY; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; TRIBOLOGY; WEAR RESISTANCE;

MICROMECHANICAL CHARACTERIZATION; MICROSCRATCHING; NANOINDENTATION; NANOINDENTER; POLYSILICON FILM; SCRATCH RESISTANCE; TRIBOMETER;

MICROELECTROMECHANICAL DEVICES;

EID: 0030869870     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1997.0010     Document Type: Article

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