Development of polysilicon igniters and temperature sensors for a micro gas turbine engine

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 280-283

  Zhang, X ^a   Mehra, A ^a,b   Ayon, A A ^a,c   Waitz, I A ^a,b  

^a BOSTON UNIVERSITY   (United States)

^b Massachusetts Institute of Technology Cambridge   (United States)

^c Sony Semiconductor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRIC CONTACTS; FINITE ELEMENT METHOD; IGNITION SYSTEMS; INTEGRATED CIRCUIT LAYOUT; INTERCONNECTION NETWORKS; MICROELECTROMECHANICAL DEVICES; POLYSILICON; RESISTORS; SENSORS; THIN FILMS; WSI CIRCUITS;

IGNITERS; MICRO GAS TURBINE ENGINE; TEMPERATURE SENSORS; WAFER INTERCONNECT SCHEME;

GAS TURBINES;

EID: 0036118035     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2002.984257     Document Type: Article

References (12)