A new technique for the fabrication of thin silicon radiation detectors

IEEE Transactions on Nuclear Science

Volumn 46, Issue 3 PART 1, 1999, Pages 218-220

  Foulon, F ^a   Rousseau, L ^a   Babadjian, L ^b   Spirkovitch, S ^b   Brambilla, A ^a   Bergonzo, P ^a  

^a CEA LETI   (France)

^b Groupe ESIEE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FABRICATION; SCHOTTKY BARRIER DIODES; SILICON ON INSULATOR TECHNOLOGY; SILICON SENSORS; SILICON WAFERS; SUBSTRATES; SURFACE ROUGHNESS;

PLANAR TECHNOLOGY; THIN SILICON RADIATION DETECTORS;

RADIATION DETECTORS;

EID: 0033354246     PISSN: 00189499     EISSN: None     Source Type: Journal    
DOI: 10.1109/23.775517     Document Type: Article

References (9)

1. A. G. Seamster, R. E. L. Green and R.G. Korteling, "Silicon detector ΔE-E particle identification : A theoretically based analysis algorithm and remarks on the fundamental limits to the resolution of particle type by ΔE-E measurements, Nucl. Instr. and Meth., Vol. 145, pp. 583-591, 1977.
2. L. Stab, "Thin epitaxial silicon detectors", Nucl. Instr. and Meth., Vol. A288, pp. 24-30, 1990.
3. L. Evensen et al., "Thin detectors for the CHICSi ΔE-E Telescope, IEEE Trans. Nucl. Sci., Vol. 44, pp. 629-634, 1997.
4. F. Foulon, P. Bergonzo, A. Brambilla, C. Jany, B. Guizard and R.D Marshall, Neutron detectors made from chemically vapour deposited semiconductors, Mat. Res. Soc. Symp. Proc., Vol. 487, pp.591-596, 1998.
5. L. Lavergne-Gosselin et al., "On the use of thin ion implanted Si detectors in heavy ion experiments", Nucl. Instr. and Meth., Vol. A276, pp. 210-215, 1989.
6. B. Schmidt, J. von Borany and D. Schubert, "Application of wet chemical selective etching to the fabrication of thin silicon detectors", Nucl. Instr. and Meth., Vol. A326, pp. 21-26, 1993.
7. O. Tabata et al., Anisotropic etching of silicon in TMAH solutions", Sensors and Actuators A, Vol. 34, pp. 51-57, 1992.
8. Second Int. Symp. Semiconductor Wafer Bonding : Science, Technology and Applications", H. Baumgart, Ch. Hunt, M. Schmidt and T. Abe (eds), Electrochem. Soc. Proc. Vol. 93-29, Electrochem. Soc., Pennington, 1993.
9. "Thin film Schottky diode detector device for detection of ionising radiation", L. Babadjian, F. Foulon, S. Spirkovitch, Patent WO9723003.