Thermal and mechanical aspects for designing micromachined low-power gas sensors

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 247-249

  Gotz A ^a   Gracia I ^a   Cane C ^a   Lora Tamayo, E ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD; MICROELECTROMECHANICAL DEVICES; SILICON; THERMAL EFFECTS;

MICROMACHINED LOW POWER GAS SENSORS;

CHEMICAL SENSORS;

EID: 0031223156     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/045     Document Type: Article

References (4)

1. Grisel A and Demarne V 1986 An integrated low power thin film gas sensor on silicon Proc. 2nd Int. Meeting on Chemical Sensors (Bordeaux) 1986
2. Möller S, Lin J and Obermeier E 1995 Material and design considerations for low-power microheater modules for gas-sensor applications Sens. Actuators B 24-25 343-6
3. Dibbern U 1990 A substrate for thin-film gas sensors in microelectronic technology Sens. Actuators B 2 63-70
4. Gall M 1991 The Si planar pellistor: a low-power pellistor sensor in Si thin-film technology Sens. Actuators B 4 533-8