Ageing behavior of polysilicon heaters for CMOS microstructures operated at temperatures up to 1200 K

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 147-150

  Ehmann, M ^a   Ruther, P ^a   Von Arx, M ^b   Baltes, H ^b   Paul, O ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; DIELECTRIC MATERIALS; MICROSENSORS; MICROSTRUCTURE; POLYSILICON; THERMAL EFFECTS;

POLYSILICON HEATERS;

CMOS INTEGRATED CIRCUITS;

EID: 0035020746     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906500     Document Type: Article

References (0)