Investigation of silicon thin membranes for MOMS

Proceedings of the International Semiconductor Conference, CAS

Volumn 2, Issue , 1998, Pages 345-348

  Muller, Raluca ^a   Obreja, Paula ^a   Manea, Elena ^a   Nastase, Nicoleta ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; ELASTOMERS; ETCHING; MASKS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SENSORS; SURFACE ROUGHNESS;

MICROOPTOMECHANICAL SYSTEMS (MOMS);

SEMICONDUCTING FILMS;

EID: 0032307459     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)