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Volumn 2, Issue , 2004, Pages 864-867

Fully CMOS-SOI compatible low-power directional flow sensor

Author keywords

CMOS compatibility; Flow sensor; Low power; SOI

Indexed keywords

RESPONSE TIME (COMPUTER SYSTEMS); SENSITIVITY ANALYSIS; SENSORS; SILICON ON INSULATOR TECHNOLOGY;

EID: 27944480084     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (9)

References (10)
  • 1
    • 0031089321 scopus 로고    scopus 로고
    • Micromachined flow sensors - A review
    • N. Nguyen, "Micromachined flow sensors - a review", Flow Meas. Instrum. From Elsevier, vol. 8, no. 1, pp. 7-16, 1997.
    • (1997) Flow Meas. Instrum. from Elsevier , vol.8 , Issue.1 , pp. 7-16
    • Nguyen, N.1
  • 2
    • 4544362190 scopus 로고    scopus 로고
    • SOI CMOS compatible low-power microheater optimization for the fabrication of Smart Gas Sensors
    • October
    • J. Laconte, C. Dupont, D. Flandre and J.-P. Raskin, "SOI CMOS compatible low-power microheater optimization for the fabrication of Smart Gas Sensors", IEEE Sensors Journal, vol. 4, no. 5, pp. 670-680, October 2004.
    • (2004) IEEE Sensors Journal , vol.4 , Issue.5 , pp. 670-680
    • Laconte, J.1    Dupont, C.2    Flandre, D.3    Raskin, J.-P.4
  • 6
    • 0343496773 scopus 로고    scopus 로고
    • Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation
    • G. Kaltsas and A. Nassiopoulou, "Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation," Sensors and Actuators A, vol. 76, pp. 133-138, 1999.
    • (1999) Sensors and Actuators A , vol.76 , pp. 133-138
    • Kaltsas, G.1    Nassiopoulou, A.2
  • 7
    • 0036544441 scopus 로고    scopus 로고
    • A smart wind sensor using thermal sigma-delta modulation techniques
    • K. Makinwa and J. Huijsing, "A smart wind sensor using thermal sigma-delta modulation techniques," Sensors and Actuators A, vol. 97-98, pp. 15-20, 2002.
    • (2002) Sensors and Actuators A , vol.97-98 , pp. 15-20
    • Makinwa, K.1    Huijsing, J.2
  • 8
    • 0032046190 scopus 로고    scopus 로고
    • An integrated thermopile structure with high responsivity using any standard CMOS process
    • T. Akin, Z. Olgun, O. Akar, and H. Kulah, "An integrated thermopile structure with high responsivity using any standard CMOS process," Sensors and Actuators A, vol. 66, pp. 218-224, 1998.
    • (1998) Sensors and Actuators A , vol.66 , pp. 218-224
    • Akin, T.1    Olgun, Z.2    Akar, O.3    Kulah, H.4
  • 9
    • 0027615153 scopus 로고
    • A high sensitivity CMOS gas flow sensor on a thin dielectric membrane
    • D. Moser and H. Baltes, "A high sensitivity CMOS gas flow sensor on a thin dielectric membrane," Sensors and Actuators A, vol. 37-38, pp. 33-37, 1993.
    • (1993) Sensors and Actuators A , vol.37-38 , pp. 33-37
    • Moser, D.1    Baltes, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.