-
1
-
-
0031089321
-
Micromachined flow sensors - A review
-
N. Nguyen, "Micromachined flow sensors - a review", Flow Meas. Instrum. From Elsevier, vol. 8, no. 1, pp. 7-16, 1997.
-
(1997)
Flow Meas. Instrum. from Elsevier
, vol.8
, Issue.1
, pp. 7-16
-
-
Nguyen, N.1
-
2
-
-
4544362190
-
SOI CMOS compatible low-power microheater optimization for the fabrication of Smart Gas Sensors
-
October
-
J. Laconte, C. Dupont, D. Flandre and J.-P. Raskin, "SOI CMOS compatible low-power microheater optimization for the fabrication of Smart Gas Sensors", IEEE Sensors Journal, vol. 4, no. 5, pp. 670-680, October 2004.
-
(2004)
IEEE Sensors Journal
, vol.4
, Issue.5
, pp. 670-680
-
-
Laconte, J.1
Dupont, C.2
Flandre, D.3
Raskin, J.-P.4
-
3
-
-
3042719615
-
A smart single-chip micro-hotplate-based gas sensor system in CMOS-technology
-
D. Barrettino, M. Graf, M. Zimmermann, C. Hagleitner, A. Hierlemann, and H.Baltes, "A smart single-chip micro-hotplate-based gas sensor system in CMOS-technology", Analog Integrated Circuits and Signal Processing, vol. 39, pp, 275-287, 2004.
-
(2004)
Analog Integrated Circuits and Signal Processing
, vol.39
, pp. 275-287
-
-
Barrettino, D.1
Graf, M.2
Zimmermann, M.3
Hagleitner, C.4
Hierlemann, A.5
Baltes, H.6
-
4
-
-
0037343398
-
Development of miniaturized semiconductor flow sensors
-
F. Kohl, R. Fasching, F. Keplinger, R. Chabicovisky, A. Jachimowicz, and G. Urban, "Development of miniaturized semiconductor flow sensors," Measurement from Elsevier, vol. 33, pp. 109-119, 2003.
-
(2003)
Measurement from Elsevier
, vol.33
, pp. 109-119
-
-
Kohl, F.1
Fasching, R.2
Keplinger, F.3
Chabicovisky, R.4
Jachimowicz, A.5
Urban, G.6
-
5
-
-
27944504586
-
Modelling and characterization of a micro gas-flow sensor
-
(Sinaia), October
-
P. Fürjes, G. Légradi, C. Dücso, A. Aszodi, and I. Barsony, "Modelling and characterization of a micro gas-flow sensor," in Proceedings of the 13th Micromechanics Europe Workshop (MME), (Sinaia), October 2002.
-
(2002)
Proceedings of the 13th Micromechanics Europe Workshop (MME)
-
-
Fürjes, P.1
Légradi, G.2
Dücso, C.3
Aszodi, A.4
Barsony, I.5
-
6
-
-
0343496773
-
Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation
-
G. Kaltsas and A. Nassiopoulou, "Novel C-MOS compatible monolithic silicon gas flow sensor with porous silicon thermal isolation," Sensors and Actuators A, vol. 76, pp. 133-138, 1999.
-
(1999)
Sensors and Actuators A
, vol.76
, pp. 133-138
-
-
Kaltsas, G.1
Nassiopoulou, A.2
-
7
-
-
0036544441
-
A smart wind sensor using thermal sigma-delta modulation techniques
-
K. Makinwa and J. Huijsing, "A smart wind sensor using thermal sigma-delta modulation techniques," Sensors and Actuators A, vol. 97-98, pp. 15-20, 2002.
-
(2002)
Sensors and Actuators A
, vol.97-98
, pp. 15-20
-
-
Makinwa, K.1
Huijsing, J.2
-
8
-
-
0032046190
-
An integrated thermopile structure with high responsivity using any standard CMOS process
-
T. Akin, Z. Olgun, O. Akar, and H. Kulah, "An integrated thermopile structure with high responsivity using any standard CMOS process," Sensors and Actuators A, vol. 66, pp. 218-224, 1998.
-
(1998)
Sensors and Actuators A
, vol.66
, pp. 218-224
-
-
Akin, T.1
Olgun, Z.2
Akar, O.3
Kulah, H.4
-
9
-
-
0027615153
-
A high sensitivity CMOS gas flow sensor on a thin dielectric membrane
-
D. Moser and H. Baltes, "A high sensitivity CMOS gas flow sensor on a thin dielectric membrane," Sensors and Actuators A, vol. 37-38, pp. 33-37, 1993.
-
(1993)
Sensors and Actuators A
, vol.37-38
, pp. 33-37
-
-
Moser, D.1
Baltes, H.2
-
10
-
-
4544221593
-
Thin films stress extraction using micromachined structures and wafer curvature measurements
-
J. Laconte, F. Iker, S. Jorez, N. André, T. Pardoen, J. Proost, D. Flandre, J.-P. Raksin, "Thin films stress extraction using micromachined structures and wafer curvature measurements", Microelectronic Engineering Journal, vol. 76, pp. 219-226, 2004.
-
(2004)
Microelectronic Engineering Journal
, vol.76
, pp. 219-226
-
-
Laconte, J.1
Iker, F.2
Jorez, S.3
André, N.4
Pardoen, T.5
Proost, J.6
Flandre, D.7
Raksin, J.-P.8
|