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Volumn 43, Issue 7, 1999, Pages 1239-1244

Design and fabrication of low power polysilicon sources

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; DESIGN; ELECTRIC RESISTANCE; ELECTRON DEVICE MANUFACTURE; ION IMPLANTATION; MICROMACHINING; SEMICONDUCTING BORON; SPACE FLIGHT;

EID: 0032633829     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(98)00339-6     Document Type: Article
Times cited : (6)

References (12)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.