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Volumn 43, Issue 7, 1999, Pages 1239-1244
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Design and fabrication of low power polysilicon sources
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Author keywords
[No Author keywords available]
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Indexed keywords
CURRENT VOLTAGE CHARACTERISTICS;
DESIGN;
ELECTRIC RESISTANCE;
ELECTRON DEVICE MANUFACTURE;
ION IMPLANTATION;
MICROMACHINING;
SEMICONDUCTING BORON;
SPACE FLIGHT;
LOW POWER POLYSILICON SOURCES;
LIGHT SOURCES;
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EID: 0032633829
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1101(98)00339-6 Document Type: Article |
Times cited : (6)
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References (12)
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