SOI CMOS Compatible Low-Power Microheater optimization and fabrication for smart gas sensor implementations

Proceedings of IEEE Sensors

Volumn 1, Issue 2, 2002, Pages 1395-1400

  Laconte, J ^a   Dupont, C ^a   Flandre, D ^a   Raskin, J P ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

Bulk micromachining; CMOS compatibility; Gas sensor; Microheater; Silicon On Insulator

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC POWER UTILIZATION; FABRICATION; MICROMACHINING; OPTIMIZATION; SILICON ON INSULATOR TECHNOLOGY; THIN FILMS;

BULK MICROMACHINING; MICROHEATERS;

CHEMICAL SENSORS;

EID: 1542361209     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

1. Afridi, M.Y., et al., Implementation of CMOS Compatible Conductance-Based Micro-Gas-Sensor System, ECCTD'01, August 2001, Finland.
2. 2 gas sensor integrated on silicon oxynitride membrane, Sensors and Actuators B, 67, pp.84-88, 2000.
3. 2 gas sensor using a FEM simulator, Sensors and Actuators A, vol. 69, pp.205-211, 1998.
4. Briand, D., et al., Design and fabrication of high-temperature micro-hotplates for drop-coated gas sensors, Sensors and Actuators B, 68, pp. 223-233, 2000.
5. Briand, D., et al., Low-Power Electronic Devices for Gas Sensing,
6. Cané, C., et al., Detection of gases with arrays of micromachined tin oxide gas sensors, Sensors and Actuators B, 65, pp. 244-246, 2000.
7. Colinge, J.P., Silicon-On-Insulator Technology: Material To VLSI, Kluwer Academic Publishers, Boston, 1991.
8. Demeûs, L., et al., Integrated sensor and electronic circuits in fully-depleted SOI technology for high-temperature applications, IEEE Trans. on Industrial electronics, 48 (2001) 272-280.
9. Dupont, C., Masters Thesis, Conception et réalisation d'un élément chauffant faible puissance micro-usiné en vue de son intégration sur un lab-on-a-chip en technologie SOI, UCL, June 2001.
10. Flandre, D., et al., Fully-depleted SOI CMOS technology for heterogeneous micropower, high-temperature or RF microsystems, Solid-State Electronics, 45 (2001) 541-549.
11. Gottfried, K., et al., Gas Sensor for High Temperature Application, Mstnews, 4, pp. 10-11, 2001.
12. Gracia, I., et al., Results on the reliability of silicon micromachined structures for semiconductor gas sensors, Sensors and Actuators B, 77, pp. 409-415, 2001.
13. 2 concentrations with low power micromachined tin oxide gas sensors, Sensors and Actuators B, 58, pp.325-329, 1999. http://www-samlab.unine.ch/Activities/Activity.htm.
14. Klaassen, E. H., Micromachined instrumentation systems, Ph.D. Thesis, Stanford University, CA, 1996.
15. Lian, K., et al., Aluminium passivation for TMAH based anisotropic etching for MEMS applications, Electronics Letters, vol. 35, issue 15, pp.1266-1267, 1999.
16. Lin, L., et al., A micor Strain Gauge with Mechanical Amplifier, Journal of Microelectromechanical Systems, Vol. 6, No. 4, pp. 313-321, December 1997.
17. LISA: Micro-Hotplates, http://lisa.polymtl.ca/Projets/Gas-Sensors.html
18. x membrane for microheater applications, Sensors and Actuators A, vol. 64, pp.241-245, 1998.
19. th International Conference on Solid-State Sensors & Actuators (Sendai, Japan), Digest of Technical Papers, pp. 1032-1035, June 1999.
20. Suehle, J.S., et al., Tin Oxide Gas Sensor Fabricated Using CMOS Micro-Hotplates and In-Situ Processing, IEEE Electron Device Letters, Vol. 14, No. 3, pp. 118-120, March 1993.