Characterization of the static and dynamic behaviour of M(O)EMs by optical techniques: Status and trends

Journal of Micromechanics and Microengineering

Volumn 13, Issue 4, 2003, Pages

  Bosseboeuf, Alain ^a   Petitgrand, Sylvain ^a  

^a UNIV PARIS SUD   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; OPTICAL RESOLVING POWER; VACUUM APPLICATIONS; VIBRATIONS (MECHANICAL);

INTERNAL STRAINS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038779664     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/13/4/304     Document Type: Conference Paper

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