Thermo-mechanical structures for the optimisation of silicon micromachined gas sensors

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2000, Pages 90-94

  Gotz, A ^a   Gracia, I ^a   Cane, C ^a   Lozano, M ^a   Lora Tamayo, E ^a  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; DIODES; ELECTRIC POWER SUPPLIES TO APPARATUS; MEMBRANES; RESISTORS; SEMICONDUCTING SILICON; SEMICONDUCTOR DEVICE MANUFACTURE; SEMICONDUCTOR DEVICE STRUCTURES; SUBSTRATES; THERMAL EFFECTS; THERMODYNAMIC PROPERTIES;

BREAKDOWN PRESSURE; DIELECTRIC MEMBRANE; LOOP SHAPED RESISTOR; POLYSILICON RESISTOR; SEMICONDUCTOR GAS SENSOR; SILICON MICROMACHINED SUBSTRATES; THERMOMECHANICAL STRUCTURE;

SILICON SENSORS;

EID: 0033692274     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)