SOI technology for single-chip harsh environment microsystems

Collection of Technical Papers - CANEUS 2004 - Conference on Micro-Nano-Technologies for Aerospace Applications

Volumn , Issue , 2004, Pages 186-198

  Flandre, Denis ^a   Laconte, Jean ^a   Levacq, David ^a   Afzalian, Aryan ^a   Rue, Bertrand ^a   Renaux, Christian ^a   Iker, François ^a   Olbrechts, Benoit ^a   André, Nicolas ^a   Raskin, Jean Pierre ^a  

^a UNIVERSITÉ CATHOLIQUE DE LOUVAIN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; DIELECTRIC DEVICES; HALL EFFECT; INTELLIGENT NETWORKS; MAGNETIC DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROPROCESSOR CHIPS; SENSORS; THIN FILMS;

MAGNETIC TRANSDUCERS; MICROMACHINING TECHNOLOGIES; MICROSYSTEMS; PHYSICAL SENSORS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 19944368773     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2004-6736     Document Type: Conference Paper

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