A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons

Sensors and Actuators, B: Chemical

Volumn 44, Issue 1-3, 1997, Pages 483-487

  Götz, Andreas ^a,c   Gràcia, Isabel ^a   Cané, Carlos ^a   Lora Tamayo, Emilio ^a   Horrillo, Maria Del Carmen ^a,b,d   Getino, Jose ^a,b   García, Carmen ^a,b   Gutiérrez, Javier ^b  

^a CSIC   (Spain)

^b Consejo Superior de Investigaciones Científicas   (Spain)

^c INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^d JOINT RESEARCH CENTRE   (Italy)

Author keywords

Benzene; FEM thermal simulations; Micromachined; Toluene

Indexed keywords

ALUMINA; BENZENE; COMPUTER SIMULATION; FINITE ELEMENT METHOD; SEMICONDUCTING TIN COMPOUNDS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DOPING; SENSITIVITY ANALYSIS; SPUTTERING; SUBSTRATES; THERMOANALYSIS; TOLUENE;

FINITE ELEMENT METHOD (FEM) THERMAL SIMULATIONS; MICROMACHINED SOLID STATE INTEGRATED GAS SENSORS;

CHEMICAL SENSORS;

EID: 0031244675     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00171-8     Document Type: Article

References (5)

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4. W. Mockwa, in: S. Yamauchi (Ed.), Chemical Sensor Technology, Vol. 4, Elsevier, Amsterdam, 1992, p. 43.
5. A. Götz, C. Cané, E. Lora-Tamayo, Specific problems of fem thermal simulations for microsystems, Proceedings of microSIM 95, Southampton, September, 1995.