Structural and dimensional control in micromachined integrated solid state gas sensors

Sensors and Actuators, B: Chemical

Volumn 69, Issue 3, 2000, Pages 314-319

  Rickerby, D G ^a   Wachter N ^a   Horrillo, M C ^b   Gutierrez J ^b   Gracia I ^c   Cane C ^c  

^a JOINT RESEARCH CENTRE   (Italy)

^b Consejo Superior de Investigaciones Científicas   (Spain)

^c CSIC   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELECTRIC CONDUCTIVITY; GRAIN SIZE AND SHAPE; HIGH RESOLUTION ELECTRON MICROSCOPY; INTERFACIAL ENERGY; MICROMACHINING; POINT DEFECTS; POROSITY; SOLID STATE DEVICES; STRESSES; THIN FILMS; TIN COMPOUNDS;

INTEGRATED SOLID STATE GAS SENSOR; INTERFACIAL ADHESION; MECHANICAL STABILITY; TIN OXIDE; TIN OXIDE GAS SENSORS;

OXYGEN SENSORS;

EID: 0342955669     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(00)00479-2     Document Type: Article

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