Fabrication of thin film microheater for gas sensors on polyimide membrane

Proceedings of IEEE Sensors

Volumn 2, Issue 1, 2003, Pages 389-392

  Aslam, M ^a   Hatfield, J V ^a  

^a UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Gas Sensors; Microheater; Micromachining; Polyimide membrane

Indexed keywords

CHEMICAL SENSORS; ETCHING; HEATING EQUIPMENT; HIGH TEMPERATURE EFFECTS; MICROMACHINING; PHOTOLITHOGRAPHY; POLYIMIDES; POLYMERIC MEMBRANES; SILICON WAFERS;

MICROHEATERS; POLYIMIDE MEMBRANES;

THIN FILMS;

EID: 1542363559     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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