Imaging setup for temperature, topography, and surface displacement measurements of microelectronic devices

Review of Scientific Instruments

Volumn 74, Issue 1 II, 2003, Pages 645-647

  Grauby, S ^a   Dilhaire, S ^a   Jorez, S ^a   Claeys, W ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGING SYSTEMS; IMAGING TECHNIQUES; INTERFEROMETRY; LIGHT EMITTING DIODES; REFLECTOMETERS; RESISTORS; SURFACE PHENOMENA;

SURFACE DISPLACEMENTS;

MICROELECTRONICS;

EID: 0037283210     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1520316     Document Type: Conference Paper

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