Force sensor using a CMOS inverter in view of its application in scanning force microscopy

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1996, Pages 447-450

  Akiyama, Terunobu ^a   Blanc, Nicolas ^a   de Rooij, Nico F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CMOS INTEGRATED CIRCUITS; ELECTRIC CONDUCTIVITY; ELECTRIC INVERTERS; MICROSCOPIC EXAMINATION; MOSFET DEVICES; SILICON WAFERS;

CMOS INVERTER; FORCE SENSOR; SCANNING FORCE MICROSCOPY; SILICON CANTILEVER;

SENSORS;

EID: 0029753124     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)